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1

Full three-dimensional characterization of 25 nm lines for chemically amplified resist simulation

S. Landis, S. Pauliac, J. Foucher, J. Thiault, F. De Crecy

Année:

2005

Langue:

english

Fichier:

PDF, 608 KB

english, 2005

2

Coerced mechanical coarsening of nanoparticle assemblies

Blunt, M. O., Martin, C. P., Ahola-Tuomi, M., Pauliac-Vaujour, E., Sharp, P., Nativo, P., Brust, M., Moriarty, P. J.

Journal:

Nature Nanotechnology

Année:

2007

Langue:

english

Fichier:

PDF, 622 KB

english, 2007

3

Modeling metallic nanoparticle synthesis in a magnetron-based nanocluster source by gas condensation of a sputtered vapor

Quesnel, E, Pauliac-Vaujour, E, Muffato, V

Journal:

Journal of Applied Physics

Année:

2010

Langue:

english

Fichier:

PDF, 582 KB

english, 2010

4

Low-Crosstalk Fabrication-Insensitive Echelle Grating Demultiplexers on Silicon-on-Insulator

Sciancalepore, Corrado, Lycett, Richard John, Dallery, Jacques A., Pauliac, Sebastien, Hassan, Karim, Harduin, Julie, Duprez, Helene, Weidenmueller, Ulf, Gallagher, Dominic F. G., Menezo, Sylvie, Baki

Journal:

IEEE Photonics Technology Letters

Année:

2015

Langue:

english

Fichier:

PDF, 541 KB

english, 2015

5

Capped carbon hard mask and trimming process: A low-cost and efficient route to nanoscale devices

Pauliac-Vaujour, Sébastien, Brianceau, Pierre, Comboroure, Corinne, Faynot, Olivier

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Année:

2013

Langue:

english

Fichier:

PDF, 3.14 MB

english, 2013

6

Patterning Strategy for Monoelectronic Device Platform in a Complementary Metal Oxide Semiconductor Technology

S. Pauliac-vaujour, R. Wacquez, C. Vizioz, T. Chevolleau, M. Pierre, B. Previtali, C. Comboroure, N. Bove, B. Roche, M. Vinet, X. Jehl, M. Sanquer, P. Sixt

Année:

2011

Langue:

english

Fichier:

PDF, 904 KB

english, 2011

7

[IEEE 2015 IEEE 12th International Conference on Group IV Photonics (GFP) - Vancouver, BC, Canada (2015.8.26-2015.8.28)] 2015 IEEE 12th International Conference on Group IV Photonics (GFP) - Advances toward temperature-independent and fabrication-insensitive (de)multiplexer in the O-band

Hassan, Karim, Sciancalepore, Corrado, Harduin, Julie, Ferrotti, Thomas, Pauliac, Sebastien, Kopp, Christophe, Menezo, Sylvie, Ben Bakir, Badhise, Lycett, Richard John, Gallagher, Dominic F. G., Dalle

Année:

2015

Langue:

english

Fichier:

PDF, 226 KB

english, 2015

8

[IEEE 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Athens, Greece (2017.4.3-2017.4.5)] 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Hydrogen silsesquioxane tri-dimensional advanced patterning concepts for high density of integration in sub-7 nm nodes

Gaben, L., Balan, V., Euvrard, C., Pauliac, S., Dallery, J.-A., Bustos, J., Dechanoz, R., Hemard, B., Koscianski, L., Bossy, X., Arvet, C., Vizioz, C., Barnola, S., Perrot, C., Sturm, J., Exbrayat, Y.

Année:

2017

Langue:

english

Fichier:

PDF, 24.42 MB

english, 2017

9

Improvement of high resolution lithography by using amorphous carbon hard mask

S. Pauliac-Vaujour, P. Brianceau, C. Comboroure, O. Faynot

Journal:

Microelectronic Engineering

Année:

2008

Langue:

english

Fichier:

PDF, 801 KB

english, 2008

10

Hybrid lithography process for nano-scale devices

S. Pauliac, S. Landis, J. Foucher, J. Thiault, O. Faynot

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 377 KB

english, 2006

11

Negative-tone chemically-amplified resist development for high resolution hybrid lithography

S. Landis, S. Pauliac, R. Hanawa, M. Suetsugu, M. Akita

Journal:

Microelectronic Engineering

Année:

2004

Langue:

english

Fichier:

PDF, 289 KB

english, 2004

12

Directing the Formation of Nanostructured Rings via Local Oxidation

Stannard, Andrew, Alhummiany, Haya, Pauliac-Vaujour, Emmanuelle, Sharp, James S., Moriarty, Philip, Thiele, Uwe

Journal:

Année:

2010

Langue:

english

Fichier:

PDF, 5.19 MB

english, 2010

13

ANISOTROPIC ASSEMBLY OF COLLOIDAL NANOPARTICLES: EXPLOITING SUBSTRATE CRYSTALLINITY

HAYTON, JAMES A., PAULIAC-VAUJOUR, EMMANUELLE, MORIARTY, PHILIP J.

Journal:

Année:

2007

Langue:

english

Fichier:

PDF, 749 KB

english, 2007

14

Controlling Pattern Formation in Nanoparticle Assemblies via Directed Solvent Dewetting

Martin, Christopher P., Blunt, Matthew O., Pauliac-Vaujour, Emmanuelle, Stannard, Andrew, Moriarty, Philip, Vancea, Ioan, Thiele, Uwe

Journal:

Physical Review Letters

Année:

2007

Langue:

english

Fichier:

PDF, 2.24 MB

english, 2007

15

Charge Transport in Cellular Nanoparticle Networks: Meandering through Nanoscale Mazes

Blunt, Matthew O., Šuvakov, Milovan, Pulizzi, Fabio, Martin, Christopher P., Pauliac-Vaujour, Emmanuelle, Stannard, Andrew, Rushforth, Andrew W., Tadić, Bosiljka, Moriarty, Philip

Journal:

Année:

2007

Langue:

english

Fichier:

PDF, 1.41 MB

english, 2007

16

Modelling approaches to the dewetting of evaporating thin films of nanoparticle suspensions

Thiele, U, Vancea, I, Archer, A J, Robbins, M J, Frastia, L, Stannard, A, Pauliac-Vaujour, E, Martin, C P, Blunt, M O, Moriarty, P J

Journal:

Journal of Physics Condensed Matter

Année:

2009

Langue:

english

Fichier:

PDF, 3.37 MB

english, 2009

17

Dual-Scale Pattern Formation in Nanoparticle Assemblies

Stannard, Andrew, Martin, Christopher P., Pauliac-Vaujour, Emmanuelle, Moriarty, Philip, Thiele, Uwe

Journal:

The Journal of Physical Chemistry C

Année:

2008

Langue:

english

Fichier:

PDF, 6.42 MB

english, 2008

18

[IEEE 2012 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2012.12.10-2012.12.13)] 2012 International Electron Devices Meeting - Scaling rules of piezoelectric nanowires in view of sensor and energy harvester integration

Hinchet, R., Ferreira, J., Keraudy, J., Ardila, G., Pauliac-Vaujour, E., Mouis, M., Montes, L.

Année:

2012

Langue:

english

Fichier:

PDF, 3.34 MB

english, 2012

19

[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Oxidation of Suspended Stacked Silicon Nanowire for Sub-10nm Cross-Section Shape Optimization

Hubert, Alexandre, Colonna, Jean-Philippe, Bécu, Stéphane, Dupré, Cécilia, Maffini-Alvaro, Virginie, Hartmann, Jean-Michel, Pauliac, Sébastien, Vizioz, Christian, Aussenac, François, Carabasse,

Année:

2008

Langue:

english

Fichier:

PDF, 595 KB

english, 2008

20

Meniscus-Mediated Organization of Colloidal Nanoparticles

Pauliac-Vaujour, E., Moriarty, P.

Journal:

The Journal of Physical Chemistry C

Année:

2007

Langue:

english

Fichier:

PDF, 494 KB

english, 2007

21

[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Ultra high resolution hybrid lithography with negative tone chemically amplified resists

Landis, S., Pauliac, S., Hanawa, R., Suestsugu, M., Akita, M.

Année:

2003

Langue:

english

Fichier:

PDF, 96 KB

english, 2003

22

[IEEE 2012 4th IEEE International Memory Workshop (IMW) - Milan, Italy (2012.05.20-2012.05.23)] 2012 4th IEEE International Memory Workshop - Physical Understanding of Program Injection and Consumption in Ultra-Scaled SiN Split-Gate Memories

Masoero, L., Molas, G., Della Marca, V., Gely, M., Cueto, O., Colonna, J. P., De Luca, A., Brianceau, P., Charpin, C., Lafond, D., Delaye, V., Aussenac, F., Carabasse, C., Pauliac, S., Comboroure, C.,

Année:

2012

Langue:

english

Fichier:

PDF, 1.04 MB

english, 2012

23

Front instabilities in evaporatively dewetting nanofluids

Vancea, I., Thiele, U., Pauliac-Vaujour, E., Stannard, A., Martin, C. P., Blunt, M. O., Moriarty, P. J.

Journal:

Physical Review E

Année:

2008

Langue:

english

Fichier:

PDF, 1.69 MB

english, 2008

24

Fingering Instabilities in Dewetting Nanofluids

Pauliac-Vaujour, E., Stannard, A., Martin, C. P., Blunt, M. O., Notingher, I., Moriarty, P. J., Vancea, I., Thiele, U.

Journal:

Physical Review Letters

Année:

2008

Langue:

english

Fichier:

PDF, 825 KB

english, 2008

25

[IEEE 2010 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2010.06.15-2010.06.17)] 2010 Symposium on VLSI Technology - Single dopant impact on electrical characteristics of SOI NMOSFETs with effective length down to 10nm

Wacquez, R., Vinet, M., Pierre, M., Roche, B., Jehl, X., Cueto, O., Verduijn, J., Tettamanzi, G. C., Rogge, S., Deshpande, V., Previtali, B., Vizioz, C., Pauliac-Vaujour, S., Comboroure, C., Bove, N.,

Année:

2010

Langue:

english

Fichier:

PDF, 1.95 MB

english, 2010

26

[IEEE 2009 IEEE International Electron Devices Meeting (IEDM) - Baltimore, MD, USA (2009.12.7-2009.12.9)] 2009 IEEE International Electron Devices Meeting (IEDM) - A stacked SONOS technology, up to 4 levels and 6nm crystalline nanowires, with Gate-All-Around or independent gates (φ-Flash), suitable for full 3D integration

Hubert, A., Nowak, E., Tachi, K., Maffini-Alvaro, V., Vizioz, C., Arvet, C., Colonna, J.-P., Hartmann, J.-M., Loup, V., Baud, L., Pauliac, S., Delaye, V., Carabasse, C., Molas, G., Ghibaudo, G., De Sa

Année:

2009

Langue:

english

Fichier:

PDF, 1.77 MB

english, 2009

27

Line edge roughness characterization with a three-dimensional atomic force microscope: Transfer during gate patterning processes

J. Thiault, J. Foucher, J. H. Tortai, O. Joubert, S. Landis, S. Pauliac

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Année:

2005

Langue:

english

Fichier:

PDF, 759 KB

english, 2005

28

High-Resolution Hybrid Lithography with Negative Tone Chemically Amplified Resists

Landis, S., Pauliac, S., Saint-Pol, J., Gourgon, C., Akita, M., Hanawa, R., Suetsugu, M.

Journal:

Japanese Journal of Applied Physics

Année:

2004

Langue:

english

Fichier:

PDF, 406 KB

english, 2004

29

GaN wire-based Langmuir–Blodgett films for self-powered flexible strain sensors

Salomon, S, Eymery, J, Pauliac-Vaujour, E

Journal:

Année:

2014

Langue:

english

Fichier:

PDF, 794 KB

english, 2014

30

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Dry Etch Challenges in Gate All Around Devices for sub 32 nm Applications

Barnola, Sebastien, Vizioz, Christian, Vulliet, Nathalie, Dupré, Cécilia, Ernst, Thomas, Gautier, Pauline, Arvet, Christian, Guillaumot, Bernard, Bernard, Emilie, Pauliac-Vaujeour, S., Comboroure, C

Année:

2008

Langue:

english

Fichier:

PDF, 4.20 MB

english, 2008

31

SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 7 February 2015)] Integrated Optics: Devices, Materials, and Technologies XIX - Low-crosstalk fabrication-insensitive echelle grating multiplexers and passives for the silicon photonics toolbox

Broquin, Jean-Emmanuel, Nunzi Conti, Gualtiero, Sciancalepore, Corrado, Lycett, Richard J., Dallery, Jacques A., Pauliac, Sebastien, Hassan, Karim, Harduin, Julie, Duprez, Hélène, Weidenmueller, Ulf,

Année:

2015

Langue:

english

Fichier:

PDF, 713 KB

english, 2015

32

Morphological anomalies in estuarine shrimp larvae

Feuillassier, Lionel, Beguer, Mélanie, Pauliac, Gaëlle, Boët, Philippe, Girardin, Michel, Elie, Pierre

Journal:

Année:

2012

Fichier:

PDF, 1.83 MB

2012

33

Hybrid high resolution lithography (e-beam/deep ultraviolet) and etch process for the fabrication of stacked nanowire metal oxide semiconductor field effect transistors

S. Pauliac-vaujour, C. Comboroure, C. Vizioz, S. Barnola, P. Brianceau, V. M. Alvaro, C. Dupré, T. Ernst

Année:

2008

Langue:

english

Fichier:

PDF, 1.40 MB

english, 2008

34

Sub-30-nm hybrid lithography (electron beam∕deep ultraviolet) and etch process for fully depleted metal oxide semiconductor transistors

S. Pauliac-vaujour, P. Brianceau, S. Landis, J. Chiaroni, O. Faynot

Année:

2007

Langue:

english

Fichier:

PDF, 682 KB

english, 2007

35

[IEEE 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO) - Rome, Italy (2015.7.27-2015.7.30)] 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO) - Pixel analysis of a force-sensing device based on individually contacted vertical piezoelectric nanowires

Perez, Edgar A. A. Leon, Pauliac-Vaujour, Emmanuelle, Mouis, Mireille

Année:

2015

Langue:

english

Fichier:

PDF, 1.44 MB

english, 2015

36

Static finite element modeling for sensor design and processing of an individually contacted laterally-bent piezoelectric nanowire

Leon Perez, Edgar, Pauliac-Vaujour, Emmanuelle, Mouis, Mireille

Journal:

IEEE Transactions on Nanotechnology

Année:

2016

Langue:

english

Fichier:

PDF, 1.09 MB

english, 2016

37

SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, California, United States (Tuesday 16 September 2014)] Photomask Technology 2014 - Photonic curvilinear data processing

Ackmann, Paul W., Hayashi, Naoya, Browning, Clyde, Quaglio, Thomas, Figueiro, Thiago, Pauliac, Sébastien, Belledent, Jérôme, Fay, Aurélien, Bustos, Jessy, Marusic, Jean-Christophe, Schiavone, Patrick

Année:

2014

Langue:

english

Fichier:

PDF, 585 KB

english, 2014

38

(Invited) Evaluation of Stacked Nanowires Transistors for CMOS: Performance and Technology Opportunities

Gaben, L., Barraud, S., Samson, M.-P., Jaud, M.-A., Martinie, S., Rozeau, O., Lacord, J., Arvet, C., Vizioz, C., Bustos, J., Dallery, J.-A., Pauliac, S., Balan, V., Euvrard-Colnat, C., Perrot, C., Lou

Journal:

ECS Transactions

Année:

2016

Langue:

english

Fichier:

PDF, 1.57 MB

english, 2016

39

Integration of Piezoelectric Nanowires Matrix onto a Microelectronics Chip

Saoutieff, E., Allain, M., Nowicki-Bringuier, Y.-R., Viana, A., Pauliac-Vaujour, E.

Journal:

Procedia Engineering

Année:

2016

Langue:

english

Fichier:

PDF, 806 KB

english, 2016

40

Flexible capacitive piezoelectric sensor with vertically aligned ultra-long GaN wires

El Kacimi, Amine, Pauliac-Vaujour, Emmanuelle, Eymery, Joel

Journal:

ACS Applied Materials & Interfaces

Année:

2018

Langue:

english

Fichier:

PDF, 1.45 MB

english, 2018

41

[IEEE 2017 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2017.12.2-2017.12.6)] 2017 IEEE International Electron Devices Meeting (IEDM) - Improvement of HfO2 based RRAM array performances by local Si implantation

Barlas, M., Grossi, A., Grenouillet, L., Vianello, E., Nolot, E., Vaxelaire, N., Blaise, P., Traore, B., Coignus, J., Perrin, F., Crochemore, R., Mazen, F., Lachal, L., Pauliac, S., Pellissier, C., Be

Année:

2017

Langue:

english

Fichier:

PDF, 1.15 MB

english, 2017

42

Piezo-Potential Generation in Capacitive Flexible Sensors Based on GaN Horizontal Wires

El Kacimi, Amine, Pauliac-Vaujour, Emmanuelle, Delléa, Olivier, Eymery, Joël

Journal:

Année:

2018

Langue:

english

Fichier:

PDF, 4.55 MB

english, 2018

43

1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration

Hermouet, Maxime, Banniard, Louise, Sansa, Marc, Fafin, Alexandre, Gely, Marc, Pauliac, Sébastien, Brianceau, Pierre, Dallery, Jacques-Alexandre, Allain, Pierre Etienne, Santos, Eduardo Gil, Favero, I

Journal:

Proceedings (American Bar Association. Section of International and Comparative Law)

Année:

2017

Langue:

english

Fichier:

PDF, 693 KB

english, 2017

44

A demonstration of the mechanical sensing capability of individually contacted vertical piezoelectric nanowires arranged in matrices

Parmar, Mitesh, Leon Perez, Edgar A.A., Ardila, Gustavo, Saoutieff, Elise, Pauliac-Vaujour, Emmanuelle, Mouis, Mireille

Journal:

Année:

2018

Langue:

english

Fichier:

PDF, 1.39 MB

english, 2018

45

[IEEE 2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) - Krakow, Poland (2019.12.2-2019.12.6)] 2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS) - Modelling and Characterization of a High-Efficiency, Cm-Scale and Low Velocity Airflow-Driven Harvester for Autonomous Wireless Sensor Nodes

Gasnier, P., Alessandri, B., Fayer, T., Garraud, N., Pauliac-Vaujour, E., Boisseau, S.

Année:

2019

Fichier:

PDF, 487 KB

2019